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XY Axis Nano-scale Large-Range Platform
With Industrial Line positioners, attocube has genuinely combined highest precision piezodrive technology with extremely rugged, yet cost effective design.
◦All ECS positioners of the Industrial Line are dedicated for operation at ambient temperature and depending on the model for pressures ranging from atmospheric to UHV.
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ECSx3030 ECSx3030/NUM(+) ECSx3040 ECSx3040/NUM(+) ECSx3050 ECSx3050/NUM(+) ECSx3060 ECSx3060/NUM(+) ECSx3070 ECSx3070/NUM(+) ECSx3080 ECSx3080/NUM(+) ECSx5050 ECSx5050/NUM(+)
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Technical Data |
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ECSx3030 |
 ECSx3030_NUM.pdf |
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ECSx3040 |
ECSx3040_NUM.pdf |
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ECSx3050 |
ECSx3050_NUM.pdf |
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| ECSx3060 | ECSx3060_NUM.pdf |
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| ECSx3070 | ECSx3070_NUM.pdf |
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| ECSx3080 | ECSx3080_NUM.pdf |
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| ECSx5050 | ECSx5050_NUM.pdf |
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