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产品中心Precis 200
The all-new Precis® 200 incorporates the most advanced design and technology from VIEW-MM. Based on the proven Innova wafer metrology system from Micro-Metric, the new Precis includes a number of configurable options that make the system more versatile, serviceable and reliable.
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| Technical Specifications | □Standard ■Optional | |||||
| X Y Z | ||||||
| Measurement Range | □ 200x200x5mm ■ 200x200x75mm | |||||
| Stage Type | Proprietary Micro-Measure™ hand-crafted, needle bearing stage design | |||||
| Stage Drive System | □ AllDCservomotor;X,Y,Z ■ ExtendedZaxis;linearmotordrive | |||||
| X-Y-Z Positional Resolution | 0.01μm | |||||
| Optics* — Typical Set-Up | ||||||
| Objective Lens | 5x | 10x | 20x | 50x | 100x | |
| Pixel Size | 0.00298 | 0.00142 | 0.00072 | 0.000296 | 0.000143 | |
| Working Distance (mm) | 23.5 | 17.5 | 4.5 | 1 | 1 | |
| Field of | X | 1.9 | 0.95 | 0.48 | 0.19 | 0.095 |
| View (mm) | Y | 1.3 | 0.65 | 0.35 | 0.14 | 0.07 |
| *Other optical configurations available | ||||||
| Camera | □ Monochrome Digital 1.4Mega Pixel | |||||
| ■ Monochrome Digita l2.0Mega Pixel | ||||||
| ■ Color digita l2.0Mega Pixel | ||||||
| Illumination | □ Programmable tungsten halogen coaxial reheated light | |||||
| ■ Programmable LED transmitted light with auto N.A stop | ||||||
| Facilities Requirements | Power:110V,1φ,60 Hz or 220V,1φ,50 Hz | |||||
| Temperature:18-20°+/-0.1°C | ||||||
| Vibration:ISO VCB class(≤1000-inch/sec;68 db max) | ||||||
| House vacuum:10-inches Hg(35kPa)—for optional vacuum wafer chuck | ||||||
| FOV Measurement Accuracy | ≤0.01μm(100x) | |||||
| FOV Measurement Repeatability | ≤0.01μm(on wafers or photomasks with 100x objective lens) | |||||
| Measurement Accuracy | E2(XY plane)=0.25+2L/1000 | |||||
| MTBF | ≥4,000 hours | |||||
| ESD Control Options | □ Class 1000 clean room compatible ■ Class100 clean room compatible | |||||
| System Dimensions | (WxDxH)1600x1250x1700mm | |||||
| Weight | Crated：1100kg Uncrated:950kg | |||||
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